Zygo Laser
| Laser type | Applied Equipment |
Laser Function |
Equipment Manufacturer |
Part Number |
Laser Model |
|
|---|---|---|---|---|---|---|
 |
Interferometer Laser | FPA2500, FPA3000 | Wafer stage | Canon | 6191-0460-0X | Zygo7701 |
| Interferometer Laser | FPA2500, FPA3000, FPS5550iZ | Wafer stage | Canon | 8070-0102-0X | Zygo7702 Zygo7702PPD |
|
| Interferometer Laser | FPA5000, FPA6000 | Wafer stage | Canon | 8070-0159-02 | Zygo7712 | |
| Interferometer Laser | Wafer stage | Canon | Zygo7714 |