HP Laser / Agilent Laser / Keysight Laser
| Laser type | Applied Equipment |
Laser Function |
Equipment Manufacturer |
Part Number |
Laser Model |
|---|---|---|---|---|---|
Interferometer Laser |
CD SEM 9380 | Wafer stage | Hitachi | HP 5517B | |
|
i10C, i11D SF120, SF130, SF140 S204 S204 S205, S206, S306 S205, S206, S306 |
Wafer stage Reticle stage Wafer stage Reticle stage Wafer stage Reticle stage |
Nikon Nikon Nikon Nikon Nikon Nikon |
KBB20630 |
HP5517B HP5517C C05 HP5517D C06 HP5517D C07 HP5517D C13 HP5517D C15 |
|
| PAS5500 |
Reticle stage Wafer stage |
ASML |
4022.435.23251 4022.435.23411 SERV.435.23411 SERV.502.30875 4022.454.71614 4022.454.71615 4022.454.71616 SERV.502.30876 |
HP5517C
HP5517D C09 HP5517D C19 |