Reticle Stocker IRS-2000(Bare Reticle Stocker)
| Content | Specification |
|---|---|
| Storge Reticle Type | 6inch Bare Reticle |
| Reticle Loading | Full Automatic |
| Storage Capacity | >2,000 |
| Host Interface | SECSⅡ-GEM or HSMS & Network Communication |
| Dimension(mm) (Length * Width * Height) | 2,300 * 1,500 * 3,200 |
| Reticle Handling Safety |
(1) sensors to detect material presence (2) sensors for reticle pick-up (3) Reticle Tilt detection sensor |
| Barcode System | Dual Reticle Barcode Reading |
| FFU System | FFU & Chemical Filter |