Reticle Stocker

Securing clean room space while storing Instead of the shelf in the stocker
Stocker Size : 1800 X 1800mm

Capacity : ≥ 1,000

Indicate whether or not the reticle is loaded by slot
Prevent Operator Loss Time with Reticle History Management and Reticle Search
Daily In,out Tracking Function

Reticle Fast Finding Function

Empty Slot Display Function
On-line management through MES linkage
Reticle history backup and restore function
Particle, NH3, Acid (Sox, Nox) components can be removed by installing Chemical Filter
Reticle Drop Prevention with Reticle Safety Interlock.

Capacity : ＞ 1000EA

Item	Specification
Model	IRS-1000
Capacity	＞ 1000(Nikon Reticle Case )
MES/SW	MES interworking possible, user interface application considering user convenience Reticle information reset function, communication with the host is possible
Bar-Code	Wired or Wireless Barcode Reader
Auto Indicator	In & Out Reticle Visual Position Tracking Function using Laser
Auto Step On / Off	Ability to turn on/off the footrest with a switch
Tracking Function & Reticle Search	Recent Loading/Unloading Reticle List search function The ability to find the desired reticle directly with the Reticle Search function
Fast In & out function	After reading multiple reticles at once, the function of In & Out
Particle protection	All Columns and Slots Grinding and Micro Polishing Chemical filter installation, particle and NH3, Acid (Sox, Nox) component removal
Size	1800mm(W) X 1800mm(D)