고객에게 최적의 서비스로 최고의 가치를 제공할 것을 약속합니다.

Photo Mask Inspection & Cleaner
  • Used to remove and inspect attached defect when storing and using photo mask in the Fab
  • Plasma-based technology compared to conventional chemical cleaning (WET) technology, eco-friendly with no chemicals
  • Applying automatic feed stop to prevent the breakage of the photo mask by operator
  • Reduced cleaning time contributes to improved exposure equipment productivity
  • Reduce costs by eliminating chemicals and repairing without removing
  • Improved cleaning ability compared to WET equipment by applying plasma + N2 pressure cleaning function